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Wetbench-System ROBOTECHNIK EUROPE OPTIwet ST30
ingeniería de procesos / máquinas e instalaciones para la ingeniería de procesos
Fabricante: ROBOTECHNIK EUROPE
Modelo:OPTIwet ST30
Tipo de máquina: Wetbench-System
Número de artículo: 168334041
Cantidad: 1
Fecha: 16.12.2025
Ubicación:
Alemania
Deutschland
Precio:
Máquina en stock:No
Seller-item-No.:INNO30389
System for wet chemical processing of wafers up to 12in, substrates up
to X/Y 9in/9in, stand-alone housing, process modules, PP process
chamber, 2 programmable media arms, rotational speed 1-4000rpm,
acceleration ramp 1-3000rpm, spin time 1-999s, exhaust process bowl 2x
DN110, chamber 2x DN110, housing 1x DN110, control 1x DN110 (each
approx. 200m³/h), CDA 8+/-2bar, vacuum -0.8+/-0.2bar, nitrogen
4.0+/-0.5bar, 3 media I5122259 drains, waste box for 2 concentrate
wastes, reagent box with pressure vessel, 4 Julabo thermostat baths.
The system was dismantled during disassembly. Viewing possible by
arrangement.
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