Wetbench-System ROBOTECHNIK EUROPE OPTIwet ST30

process engineering / machines and plants for process engineering

Manufacturer: ROBOTECHNIK EUROPE

Model:OPTIwet ST30

Type of machine: Wetbench-System

item-No.: 168334041

Quantity: 1

Date: 16.12.2025

Location: Land-de Germany Deutschland

Price:


Machine in stock:No

Seller-item-No.:INNO30389

System for wet chemical processing of wafers up to 12in, substrates up to X/Y 9in/9in, stand-alone housing, process modules, PP process chamber, 2 programmable media arms, rotational speed 1-4000rpm, acceleration ramp 1-3000rpm, spin time 1-999s, exhaust process bowl 2x DN110, chamber 2x DN110, housing 1x DN110, control 1x DN110 (each approx. 200m³/h), CDA 8+/-2bar, vacuum -0.8+/-0.2bar, nitrogen 4.0+/-0.5bar, 3 media I5122259 drains, waste box for 2 concentrate wastes, reagent box with pressure vessel, 4 Julabo thermostat baths. The system was dismantled during disassembly. Viewing possible by arrangement.
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System for wet chemical processing of wafers up to 12in, substrates up to X/Y 9in/9in, stand-alone housing, process modules, PP process chamber, 2 programmable media arms, rotational speed 1-4000rpm, acceleration ramp 1-3000rpm, spin time 1-999s, exhaust process bowl 2x DN110, chamber 2x DN110, housing 1x DN110, control 1x DN110 (each approx. 200m³/h), CDA 8+/-2bar, vacuum -0.8+/-0.2bar, nitrogen 4.0+/-0.5bar, 3 media I5122259 drains, waste box for 2 I5122259 concentrate wastes, reagent box with pressure vessel, 4 Julabo thermostat baths. The system was dismantled during disassembly. Viewing possible by arrangement.
seller offer No. resale INNO30389
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Seller

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Innovac GmbH

Mr Thierry Bisso
12161 Berlin
Germany

RESALE member since 2007

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