ZYGO - MESA Horizontal - 2001 - 3D Measuring Machines

Flatness measurement for rough surfaces with waviness up to 150μm

Technical data:

Laser Source HeNe, Laser Class IIIa

Wavelength: 633 nm

Data points: 640 x 480 pixels

Working distance ~ 54 mm

Simulated wavelength ~ 12 μm

Measuring range

Vertical 150 μm

Horizontal 100mm x 140mm

Measurement resolution

Vertical 2 nm

Lateral 120μm (2x zoom); 240μm (1x zoom)

Measurement result output

2D / 3D Topographies MetroPro

Data formats: .dat, .sdf, ascii, jpg, bmp, tiff


Hardware / Software:

Device comes with computer and software



Only the Zygo with the complete computer will come to the auction. All other objects visible in
the background, as well as the clamping plate, are not part of the auction.

Auction-ID: A1-51071-5
seller offer No. resale 25b44153-65cd-48ac-ab0f-9f068c853d2e